my country has established an independent integrated circuit manufacturing technology system

Successfully developed high-end equipment such as 14-nanometer etching machine——

Today, integrated circuits concentrated on small chips have become an important support for social development. Computers, mobile phones, home appliances, automobiles, robots and other products are inseparable from integrated circuits. Without the support of the integrated circuit industry, the information society has lost its foundation, and integrated circuits have been hailed as the "food" of modern industry.

As the world's largest semiconductor market, my country's demand for integrated circuit products continues to grow rapidly. For a long time, developed countries have strictly reviewed and restricted the manufacturing equipment, materials and process technology exported to China. To have high-tech chips with independent intellectual property rights, we must develop our own integrated circuit industry system.

In 2008, the National Science and Technology Special Project of "Very Large Scale Integrated Circuit Manufacturing Equipment and Complete Processes" began to be implemented. Its overall goal is to develop integrated circuit manufacturing equipment, complete process and material technology research, master core technologies, develop key products, and realize industry Independent innovation and development.

"Before the implementation of the special project, China's high-end integrated circuit equipment and materials were basically in a blank state, completely dependent on imports, and the industrial chain was seriously missing." said Ye Tianchun, the chief engineer of integrated circuit technology. After 9 years of hard work by 20,000 scientific and technological workers, China has already Successfully developed more than 30 high-end equipment such as 14-nanometer etching machine, thin film deposition and hundreds of materials such as target materials and polishing liquids. The performance has reached the international advanced level. It has passed the rigorous assessment of the large production line and started to apply in batches and export to overseas , Thus achieving a breakthrough from scratch, filling the gap in the industrial chain, and enabling the establishment and improvement of China's integrated circuit manufacturing technology system and industrial ecology.

On the basis of these achievements, domestic enterprises have also applied these high-end achievements to develop a complete set of LED and photovoltaic manufacturing equipment, which has greatly increased the comprehensive competitiveness of my country's pan-semiconductor industries such as LED and photovoltaics, and achieved an internationally leading industrial scale and technological level.

The implementation of this major project has also enabled my country's manufacturing process and packaging integration to grow from weak to strong, with rapid technological progress and a substantial increase in international competitiveness. "Before 2008, the most advanced mass production process of domestic integrated circuit manufacturing was 130 nanometers, and the R&D process was 90 nanometers. Since the implementation of the special project, the mainstream process level has improved by 5 generations, and the three generations of 55, 40, and 28 nanometer complete sets of processes have been successfully developed and realized. Mass production, 22, 14 nanometer leading technology research and development has made breakthroughs, and independent intellectual property rights have been formed; packaging companies have moved from low-end to high-end, and the three-dimensional high-density integration technology has reached the international advanced level." Ye Tianchun said that smart phones, Chip products such as smart cards have entered the market in large quantities, enhancing the competitiveness of China's information industry.

The lack of independent intellectual property rights has always been a bottleneck restricting the independent innovation and development of my country's integrated circuit companies. Therefore, fostering an independent intellectual property rights system is the top priority for the implementation of major scientific and technological projects. Ye Tianchun said that the integrated circuit project has applied for more than 23,000 domestic invention patents and more than 2,000 international invention patents. The intellectual property system formed has caused great changes in the strength and position of domestic enterprises in international competition, and the development model has also changed. "Introduction, digestion, absorption and re-innovation" is transformed into a new model of "independent research and development plus international cooperation".

"Despite major breakthroughs in the field of technology and materials, I think the biggest progress of this project is the formation of China's own integrated circuit manufacturing technology system. The establishment of the industrial system is like building a "pyramid" with technologies at all levels. And products. We used to have only a few bases for integrated circuits, and at most we have a few flagpoles on the bases. Now we have equipment materials and craftsmanship. We have built our own "pyramid". We are confident to join the international competition. This kind of competition is the competition between system and system." Ye Tianchun said.

The process of constructing the industrial system is inseparable from the innovation of institutional mechanisms. Zhang Boxu, director of the Beijing Municipal Commission of Economy and Information Technology, stated that the assessment system of “downstream assessment upstream, complete machine assessment components, application assessment technology, and market assessment products” guarantees the practicality of scientific research results and creates a large number of high-end products that can withstand market testing. product.

In addition, during the implementation of the special project, a new model of effective coordination of the industrial chain, innovation chain, and financial chain was adopted. "Special projects and key regional industrial development plans coordinated the layout, actively guided local and social industrial investment follow-up support, effectively promoted the industrialization of special results, supported enterprises to become bigger and stronger, formed an industrial scale, and improved overall industrial strength." Zhang Boxu said With special support, a number of leading companies have entered the forefront of the world, and a number of key companies have begun to actively participate in international competition. Companies with special support have been favored in the capital market.

Ye Tianchun said that the project has been systematically deployed in 14-nanometer equipment, technology, packaging, materials, etc., and it is expected to be fully industrialized by 2018. The "13th Five-Year Plan" will also focus on supporting the research and development of international advanced technologies such as 7 to 5 nanometer processes and three-dimensional memory, supporting Chinese companies to have core competitiveness in the global industrial chain, achieve independent industrial development, and form unique advantages.